Comparative Study of SIMOX Structures Using Four Analytical...

Surface and Interface Analysis 1996 / 04 Vol. 24; Iss. 4

Comparative Study of SIMOX Structures Using Four Analytical Techniques

Fukarek, W., Yankov, R. A., Skorupa, W.
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Volume:
24
Language:
english
Pages:
9
Journal:
Surface and Interface Analysis
DOI:
10.1002/(sici)1096-9918(199604)24:43.0.co;2-h
Date:
April, 1996
File:
PDF, 1.20 MB
english, 1996
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