SIMS Depth Profiling of Delta-doped Layers in Silicon

Surface and Interface Analysis 1996 / 07 Vol. 24; Iss. 7

SIMS Depth Profiling of Delta-doped Layers in Silicon

Smirnov, V. K., Simakin, S. G., Potapov, E. V., Makarov, V. V.
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Volume:
24
Language:
english
Pages:
7
Journal:
Surface and Interface Analysis
DOI:
10.1002/(sici)1096-9918(199607)24:73.0.co;2-u
Date:
July, 1996
File:
PDF, 723 KB
english, 1996
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