Thin periodic structures in photoresist: fabrication and...

Applied Optics 1976 Vol. 15; Iss. 9

Thin periodic structures in photoresist: fabrication and experimental evaluation

Austin, Stewart, Stone, F. T.
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Volume:
15
Year:
1976
Language:
english
Journal:
ao/15/9/ao-15-9-2126.pdf
DOI:
10.1364/AO.15.002126
File:
PDF, 572 KB
english, 1976
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