Holographic evaluation of resolution in amorphous chalcogenide inorganic photoresists
Hou, T. W., Chang, M. S.Volume:
18
Year:
1979
Language:
english
Journal:
ao/18/11/ao-18-11-1753.pdf
DOI:
10.1364/AO.18.001753
File:
PDF, 474 KB
english, 1979