Strain-induced anisotropy measurement in oxide films grown...

Applied Optics 1982 Vol. 21; Iss. 18

Strain-induced anisotropy measurement in oxide films grown on silicon

Pedinoff, M. E., Mayer, D. C., Stafsudd, O. M., Dunn, G. L.
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Volume:
21
Year:
1982
Language:
english
Journal:
ao/21/18/ao-21-18-3307.pdf
DOI:
10.1364/AO.21.003307
File:
PDF, 804 KB
english, 1982
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