Soft x-ray lithography using radiation from laser-produced plasmas
Gohil, P., Kapoor, H., Ma, D., Pekerar, M. C., McIlrath, T. J., Ginter, M. L.Volume:
24
Year:
1985
Language:
english
Journal:
ao/24/13/ao-24-13-2024.pdf
DOI:
10.1364/AO.24.002024
File:
PDF, 569 KB
english, 1985