X-ray lithography using a KrF laser-plasma source

Applied Optics 1986 Vol. 25; Iss. 4

X-ray lithography using a KrF laser-plasma source

O’Neill, F., Gower, M. C., Turcu, I. C. E., Owadano, Y.
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Volume:
25
Year:
1986
Language:
english
Journal:
ao/25/4/ao-25-4-464.pdf
DOI:
10.1364/AO.25.000464
File:
PDF, 440 KB
english, 1986
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