Extreme ultraviolet reflectors with metal-oxide...

Extreme ultraviolet reflectors with metal-oxide multilayered structures

Delaboudiniere, Jean-Pierre, Vien, Tran Khanh, Stehle, Jean-Louis, Bernstein, Pierre, Nevot, Louis
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Volume:
25
Year:
1986
Language:
english
Journal:
ao/25/8/ao-25-8-1266.pdf
DOI:
10.1364/AO.25.001266
File:
PDF, 371 KB
english, 1986
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