Resuscitation of carbon-contaminated mirrors and gratings...

Applied Optics 1987 Vol. 26; Iss. 18

Resuscitation of carbon-contaminated mirrors and gratings by oxygen-discharge cleaning in the 4-40-eV range

Koide, Tsuneharu, Yanagihara, Mihiro, Aiura, Yoshihiro, Sato, Shigeru, Shidara, Tetsuo, Fujimori, Atsushi, Fukutani, Hirohito, Niwano, Michio, Kato, Hiroo
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Volume:
26
Year:
1987
Language:
english
Journal:
ao/26/18/ao-26-18-3884.pdf
DOI:
10.1364/AO.26.003884
File:
PDF, 2.07 MB
english, 1987
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