Laser-beam writing system for optical integrated circuits
Haruna, Masamitsu, Yoshida, S., Toda, H., Nishihara, H.Volume:
26
Year:
1987
Language:
english
Journal:
ao/26/21/ao-26-21-4587.pdf
DOI:
10.1364/AO.26.004587
File:
PDF, 985 KB
english, 1987