Self-diffraction for intrinsic optical modulation evolution...

Applied Optics 1988 Vol. 27; Iss. 10

Self-diffraction for intrinsic optical modulation evolution measurement in photoresists

Cescato, Lucila, Frejlich, Jaime
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Volume:
27
Year:
1988
Language:
english
Journal:
ao/27/10/ao-27-10-1984.pdf
DOI:
10.1364/AO.27.001984
File:
PDF, 381 KB
english, 1988
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