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Soft x-ray radiation from laser-produced plasmas: characterization of radiation emission and its use in x-ray lithography
Kühne, Michael, Petzold, Hans-ChristianVolume:
27
Year:
1988
Language:
english
Journal:
ao/27/18/ao-27-18-3926.pdf
DOI:
10.1364/AO.27.003926
File:
PDF, 1.07 MB
english, 1988