Small blaze angle gratings with various surface treatments...

Applied Optics 1989 Vol. 28; Iss. 23

Small blaze angle gratings with various surface treatments for use in the extreme ultraviolet

Miller, Anne, Jelinsky, Patrick, Bowyer, Stuart, Welsh, Barry Y.
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Volume:
28
Year:
1989
Language:
english
Journal:
ao/28/23/ao-28-23-4971.pdf
DOI:
10.1364/AO.28.004971
File:
PDF, 855 KB
english, 1989
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