![](/img/cover-not-exists.png)
EUV efficiency of a 6000-grooves mm^-1 diffraction grating
Hurwitz, Mark, Bowyer, Stuart, Edelstein, Jerry, Harada, Tatsuo, Kita, ToshiakiVolume:
29
Year:
1990
Language:
english
Journal:
ao/29/13/ao-29-13-1866.pdf
DOI:
10.1364/AO.29.001866
File:
PDF, 669 KB
english, 1990