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Structural and optical properties of silicon oxynitride on silicon planar waveguides
Giudice, Massimo del, Bruno, Franco, Cicinelli, Tito, Valli, MarcoVolume:
29
Year:
1990
Language:
english
Journal:
ao/29/24/ao-29-24-3489.pdf
DOI:
10.1364/AO.29.003489
File:
PDF, 975 KB
english, 1990