Single Photomask, Multilevel Kinoforms In Quartz And...

Applied Optics 1990 Vol. 29; Iss. 28

Single Photomask, Multilevel Kinoforms In Quartz And Photoresist: Manufacture And Evaluation

Andersson, H., Ekberg, Mats, Hård, Sverker, Jacobsson, Stellan, Larsson, Michael, Nilsson, T.
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Volume:
29
Year:
1990
Language:
english
Journal:
ao/29/28/ao-29-28-4259.pdf
DOI:
10.1364/AO.29.004259
File:
PDF, 1.98 MB
english, 1990
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