Performance of multilayer coated diffraction gratings in the EUV
Keski-Kuha, Ritva A. M., Thomas, Roger J., Gum, Jeffrey S., Condor, Charles E.Volume:
29
Year:
1990
Language:
english
Journal:
ao/29/31/ao-29-31-4529.pdf
DOI:
10.1364/AO.29.004529
File:
PDF, 1.02 MB
english, 1990