Efficient zone plate array accessor for optoelectronic integrated circuits: design and fabrication
Kodate, Kashiko, Tokunaga, Eriko, Tatuno, Yukiko, Chen, JingLi, Kamiya, TakeshiVolume:
29
Year:
1990
Language:
english
Journal:
ao/29/34/ao-29-34-5115.pdf
DOI:
10.1364/AO.29.005115
File:
PDF, 592 KB
english, 1990