Low-pressure chemical vapor deposition silicon-oxynitride...

Low-pressure chemical vapor deposition silicon-oxynitride films for integrated optics

Gleine, W., Müller, J.
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Volume:
31
Year:
1992
Language:
english
Journal:
ao/31/12/ao-31-12-2036.pdf
DOI:
10.1364/AO.31.002036
File:
PDF, 609 KB
english, 1992
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