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Practical magnetron sputtering system for the deposition of optical multilayer coatings
Dobrowolski, J. A., Pekelsky, James R., Pelletier, R., Ranger, M., Sullivan, Brian T., Waldorf, A. J.Volume:
31
Year:
1992
Language:
english
Journal:
ao/31/19/ao-31-19-3784.pdf
DOI:
10.1364/AO.31.003784
File:
PDF, 822 KB
english, 1992