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Differential amplitude scanning optical microscope computer aided for linewidth measurements
Bozhevolnaya, E. A., Bozhevolnyi, S. I., Postnikov, A. V.Volume:
31
Year:
1992
Language:
english
Journal:
ao/31/32/ao-31-32-6836.pdf
DOI:
10.1364/AO.31.006836
File:
PDF, 487 KB
english, 1992