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Synchrotron radiation sources and condensers for projection x-ray lithography
Murphy, J. B., White, D. L., MacDowell, Alastair A., Wood II, Obert R.Volume:
32
Year:
1993
Language:
english
Journal:
ao/32/34/ao-32-34-6920.pdf
DOI:
10.1364/AO.32.006920
File:
PDF, 1.26 MB
english, 1993