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Prototype high-speed tape target transport for a laser plasma soft-x-ray projection lithography source
Haney, Steven J., Berger, Kurt W., Kubiak, Glenn D., Rockett, Paul D., Hunter, JohnVolume:
32
Year:
1993
Language:
english
Journal:
ao/32/34/ao-32-34-6934.pdf
DOI:
10.1364/AO.32.006934
File:
PDF, 477 KB
english, 1993