Radiation hardness of molybdenum silicon multilayers...

Applied Optics 1993 Vol. 32; Iss. 34

Radiation hardness of molybdenum silicon multilayers designed for use in a soft-x-ray projection lithography system

Gaines, David P., Spitzer, Ronnie C., Ceglio, Natale M., Krumrey, Michael, Ulm, Gerhard
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Volume:
32
Year:
1993
Language:
english
Journal:
ao/32/34/ao-32-34-6991.pdf
DOI:
10.1364/AO.32.006991
File:
PDF, 1013 KB
english, 1993
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