Undulator radiation for at-wavelength interferometry of...

Applied Optics 1993 Vol. 32; Iss. 34

Undulator radiation for at-wavelength interferometry of optics for extreme-ultraviolet lithography

Attwood, David, Sommargren, Gary, Beguiristain, Raul, Nguyen, Khanh, Bokor, Jeffrey, Ceglio, Natale, Jackson, Keith, Koike, Masato, Underwood, James
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Volume:
32
Year:
1993
Language:
english
Journal:
ao/32/34/ao-32-34-7022.pdf
DOI:
10.1364/AO.32.007022
File:
PDF, 1.27 MB
english, 1993
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