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Wavelength considerations in soft-x-ray projection lithography
Hawryluk, Andrew M., Ceglio, Natale M.Volume:
32
Year:
1993
Language:
english
Journal:
ao/32/34/ao-32-34-7062.pdf
DOI:
10.1364/AO.32.007062
File:
PDF, 686 KB
english, 1993