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Soft-x-ray projection lithography experiments using Schwarzschild imaging optics
Tichenor, D. A., Kubiak, G. D., Malinowski, M. E., Stulen, R. H., Haney, S. J., Berger, K. W., Brown, L. A., Sweatt, W. C., Bjorkholm, J. E., Freeman, R. R.Volume:
32
Year:
1993
Language:
english
Journal:
ao/32/34/ao-32-34-7068.pdf
DOI:
10.1364/AO.32.007068
File:
PDF, 770 KB
english, 1993