Four-beam laser interferometry for three-dimensional...

Applied Optics 1994 Vol. 33; Iss. 1

Four-beam laser interferometry for three-dimensional microscopic coordinate measurement

Nakamura, Osamu, Goto, Mitsuo
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Volume:
33
Year:
1994
Language:
english
Journal:
ao/33/1/ao-33-1-31.pdf
DOI:
10.1364/AO.33.000031
File:
PDF, 757 KB
english, 1994
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