Nanometer-resolution distance measurement with a...

Applied Optics 1994 Vol. 33; Iss. 1

Nanometer-resolution distance measurement with a noninterferometric method

Deng, Kung-Li, Wang, Jyhpyng
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Volume:
33
Year:
1994
Language:
english
Journal:
ao/33/1/ao-33-1-113.pdf
DOI:
10.1364/AO.33.000113
File:
PDF, 468 KB
english, 1994
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