Polarization-enhanced imaging of photoresist gratings in the real-time scanning optical microscope
Corle, Timothy R., Mantalas, Lynda C., Kaack, Torsten R., LaComb, Jr., Lloyd J.Volume:
33
Year:
1994
Language:
english
Journal:
ao/33/4/ao-33-4-670.pdf
DOI:
10.1364/AO.33.000670
File:
PDF, 2.20 MB
english, 1994