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Optical pattern recognition measurements of trench arrays with submicrometer dimensions
Chim, Stanley S. C., Kino, Gordon S.Volume:
33
Year:
1994
Language:
english
Journal:
ao/33/4/ao-33-4-678.pdf
DOI:
10.1364/AO.33.000678
File:
PDF, 919 KB
english, 1994