High-accuracy profiler that uses depth from focus

Applied Optics 1994 Vol. 33; Iss. 4

High-accuracy profiler that uses depth from focus

Fieguth, Paul W., Staelin, David H.
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Volume:
33
Year:
1994
Language:
english
Journal:
ao/33/4/ao-33-4-686.pdf
DOI:
10.1364/AO.33.000686
File:
PDF, 484 KB
english, 1994
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