Time-dependent phenomena in plasma-assisted chemical vapor...

Time-dependent phenomena in plasma-assisted chemical vapor deposition of rugate optical films

Sainty, W. G., McFall, W. D., McKenzie, D. R., Yin, Y.
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Volume:
34
Year:
1995
Language:
english
Journal:
ao/34/25/ao-34-25-5659.pdf
DOI:
10.1364/AO.34.005659
File:
PDF, 215 KB
english, 1995
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