Surface morphologies of sputter-deposited aluminum films studied using a high-resolution phase-measuring laser interferometric microscope
Furukawa, Masakazu, Yamamoto, Yoshito, Ikakura, Hiroshi, Tanaka, Nobuo, Hashimoto, Masayuki, Sano, Atsushi, Shingubara, ShosoVolume:
35
Year:
1996
Language:
english
Journal:
ao/35/4/ao-35-4-701.pdf
DOI:
10.1364/AO.35.000701
File:
PDF, 496 KB
english, 1996