Small-feature-size fan-out kinoform etched in GaAs
Bengtsson, Jörgen, Eriksson, Niklas, Larsson, AndersVolume:
35
Year:
1996
Language:
english
Journal:
ao/35/5/ao-35-5-801.pdf
DOI:
10.1364/AO.35.000801
File:
PDF, 386 KB
english, 1996