Effects of bombardment on optical properties during the deposition of silicon nitride by reactive ion-beam sputtering
Lambrinos, M. F., Valizadeh, R., Colligon, J. S.Volume:
35
Year:
1996
Language:
english
Journal:
ao/35/19/ao-35-19-3620.pdf
DOI:
10.1364/AO.35.003620
File:
PDF, 197 KB
english, 1996