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Titanium oxide film for the bottom antireflective layer in deep ultraviolet lithography
Jun, Byung-Hyuk, Han, Sang-Soo, Kim, Kyong-Sub, Lee, Joon-Sung, Jiang, Zhong-Tao, Bae, Byeong-Soo, No, Kwangsoo, Kim, Dong-Wan, Kang, Ho-Young, Koh, Young-BumVolume:
36
Year:
1997
Language:
english
Journal:
ao/36/7/ao-36-7-1482.pdf
DOI:
10.1364/AO.36.001482
File:
PDF, 428 KB
english, 1997