Calibration method of the specific characteristic of an...

Calibration method of the specific characteristic of an electronic system of a rotating-analyzer ellipsometer

Kawabata, Shuichi, Motoki, Masahiro, Yokota, Hidesi
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Volume:
36
Year:
1997
Language:
english
Journal:
ao/36/10/ao-36-10-2178.pdf
DOI:
10.1364/AO.36.002178
File:
PDF, 239 KB
english, 1997
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