Calibration method of the specific characteristic of an electronic system of a rotating-analyzer ellipsometer
Kawabata, Shuichi, Motoki, Masahiro, Yokota, HidesiVolume:
36
Year:
1997
Language:
english
Journal:
ao/36/10/ao-36-10-2178.pdf
DOI:
10.1364/AO.36.002178
File:
PDF, 239 KB
english, 1997