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Investigation of rough surfaces and transparent birefringent samples with Mueller-matrix scatterometry
Delplancke, Françoise H.Volume:
36
Year:
1997
Language:
english
Journal:
ao/36/30/ao-36-30-7621.pdf
DOI:
10.1364/AO.36.007621
File:
PDF, 573 KB
english, 1997