Radio-Frequency-Preionized Xenon Z-Pinch Source for Extreme...

Applied Optics 1998 Vol. 37; Iss. 9

Radio-Frequency-Preionized Xenon Z-Pinch Source for Extreme Ultraviolet Lithography

McGeoch, Malcolm
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Volume:
37
Year:
1998
Language:
english
Journal:
ao/37/9/ao-37-9-1651.pdf
DOI:
10.1364/AO.37.001651
File:
PDF, 242 KB
english, 1998
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