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Fast Surface Profiling by Spectral Analysis of White-Light...

Fast Surface Profiling by Spectral Analysis of White-Light Interferograms with Fourier Transform Spectroscopy

Hart, Matthew, Vass, David G., Begbie, Mark L.
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Volume:
37
Year:
1998
Language:
english
Journal:
ao/37/10/ao-37-10-1764.pdf
DOI:
10.1364/AO.37.001764
File:
PDF, 243 KB
english, 1998
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