Ellipsometric Scatterometry for the Metrology of Sub-0.1- νm-Linewidth Structures
Minhas, Babar K., Coulombe, Stephen A., Naqvi, S. Sohail H., McNeil, John R.Volume:
37
Year:
1998
Language:
english
Journal:
ao/37/22/ao-37-22-5112.pdf
DOI:
10.1364/AO.37.005112
File:
PDF, 93 KB
english, 1998