Highly Repetitive, Extreme-Ultraviolet Radiation Source...

Applied Optics 1999 Vol. 38; Iss. 25

Highly Repetitive, Extreme-Ultraviolet Radiation Source Based on a Gas-Discharge Plasma

Bergmann, Klaus, Schriever, Guido, Rosier, Oliver, Müller, Martin, Neff, Willi, Lebert, Rainer
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Volume:
38
Year:
1999
Language:
english
Journal:
ao/38/25/ao-38-25-5413.pdf
DOI:
10.1364/AO.38.005413
File:
PDF, 112 KB
english, 1999
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