Nontranslational three-dimensional profilometry by...

Applied Optics 2000 Vol. 39; Iss. 16

Nontranslational three-dimensional profilometry by chromatic confocal microscopy with dynamically configurable micromirror scanning

Cha, Sungdo, Lin, Paul C., Zhu, Lijun, Sun, Pang-Chen, Fainman, Yeshaiahu
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Volume:
39
Year:
2000
Language:
english
Journal:
ao/39/16/ao-39-16-2605.pdf
DOI:
10.1364/AO.39.002605
File:
PDF, 1.32 MB
english, 2000
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