Atomic-Hydrogen Mapping in Hot-Filament Chemical-Vapor...

Applied Optics 2001 Vol. 40; Iss. 6

Atomic-Hydrogen Mapping in Hot-Filament Chemical-Vapor Deposition

Larjo, Jussi, Koivikko, Heidi, Li, Daming, Hernberg, Rolf
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Volume:
40
Year:
2001
Language:
english
Journal:
ao/40/6/ao-40-6-765.pdf
DOI:
10.1364/AO.40.000765
File:
PDF, 1.02 MB
english, 2001
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