Focus Measurement with a Simple Pattern Design

Applied Optics 2001 Vol. 40; Iss. 16

Focus Measurement with a Simple Pattern Design

Ku, Chin-Yu, Lei, Tan Fu, Lin, Hwang-Kuen
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Volume:
40
Year:
2001
Language:
english
Journal:
ao/40/16/ao-40-16-2662.pdf
DOI:
10.1364/AO.40.002662
File:
PDF, 1.40 MB
english, 2001
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