Photoresist Characterization and Linearization Procedure for the Gray-Scale Fabrication of Diffractive Optical Elements
LeCompte, Marion, Gao, Xiang, Prather, Dennis W.Volume:
40
Year:
2001
Language:
english
Journal:
ao/40/32/ao-40-32-5921.pdf
DOI:
10.1364/AO.40.005921
File:
PDF, 418 KB
english, 2001