Ion-Assisted Deposition of Moisture-Stable Hafnium Oxide...

Applied Optics 2002 Vol. 41; Iss. 16

Ion-Assisted Deposition of Moisture-Stable Hafnium Oxide Films for Ultraviolet Applications

Jensen, Traci R., Warren, John, Johnson, Robert L.
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Volume:
41
Year:
2002
Language:
english
Journal:
ao/41/16/ao-41-16-3205.pdf
DOI:
10.1364/AO.41.003205
File:
PDF, 134 KB
english, 2002
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