Development of Optical Coatings for 157-nm Lithography. II....

Applied Optics 2002 Vol. 41; Iss. 16

Development of Optical Coatings for 157-nm Lithography. II. Reflectance, Absorption, and Scatter Measurement

Otani, Minoru, Biro, Ryuji, Ouchi, Chidane, Hasegawa, Masanobu, Suzuki, Yasuyuki, Sone, Kazuho, Niisaka, Shunsuke, Saito, Tadahiko, Saito, Jun, Tanaka, Akira
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Volume:
41
Year:
2002
Language:
english
Journal:
ao/41/16/ao-41-16-3248.pdf
DOI:
10.1364/AO.41.003248
File:
PDF, 773 KB
english, 2002
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