Black Layer Coatings for the Photolithographic Manufacture...

Applied Optics 2002 Vol. 41; Iss. 16

Black Layer Coatings for the Photolithographic Manufacture of Diffraction Gratings

Poitras, Daniel, Dobrowolski, J. A., Cassidy, Tom, Midwinter, Clive, McElroy, C. Thomas
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Volume:
41
Year:
2002
Language:
english
Journal:
ao/41/16/ao-41-16-3306.pdf
DOI:
10.1364/AO.41.003306
File:
PDF, 223 KB
english, 2002
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